https://scholars.lib.ntu.edu.tw/handle/123456789/292634
Title: | The characteristic behavior of TMAH water solution for anisotropic etching on both silicon substrate and SiO 2 layer | Authors: | Chen, P.-H. Peng, H.-Y. Hsieh, C.-M. Chyu, M.K. PING-HEI CHEN |
Issue Date: | 2001 | Journal Volume: | 93 | Journal Issue: | 2 | Start page/Pages: | 132-137 | Source: | Sensors and Actuators, A: Physical | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0035975618&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/292634 |
DOI: | 10.1016/S0924-4247(01)00639-2 |
Appears in Collections: | 機械工程學系 |
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