https://scholars.lib.ntu.edu.tw/handle/123456789/293165
Title: | Interface reactions of high-k Y2O3 gate oxides with Si | Authors: | Busch, BW Kwo, J Hong, M Mannaerts, JP Sapjeta, BJ Schulte, WH Garfunkel, E Gustafsson, T MINGHWEI HONG |
Issue Date: | 2001 | Journal Volume: | 79 | Journal Issue: | 15 | Start page/Pages: | 2447-2449 | Source: | Applied Physics Letters | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/293165 |
Appears in Collections: | 應用物理研究所 |
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