https://scholars.lib.ntu.edu.tw/handle/123456789/293528| Title: | A plastic-fibre-bundle-based transducer array for mapping and detection of the end point for dissolution of a photoresist | Authors: | Lin, G.-R. Horng, J.S. GONG-RU LIN |
Issue Date: | 2001 | Journal Volume: | 12 | Journal Issue: | 3 | Start page/Pages: | 273-277 | Source: | Measurement Science and Technology | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0035282442&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/293528 |
DOI: | 10.1088/0957-0233/12/3/305 |
| Appears in Collections: | 光電工程學研究所 |
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