https://scholars.lib.ntu.edu.tw/handle/123456789/296939
Title: | Effect of mechanical stress on characteristics of silicon thermal oxides | Authors: | Yen, J.-Y. Huang, C.-H. Hwu, J.-G. JENN-GWO HWU |
Issue Date: | 2002 | Journal Volume: | 41 | Journal Issue: | 1 | Start page/Pages: | 81-82 | Source: | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0036317703&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/296939 |
Appears in Collections: | 電機工程學系 |
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