Investigation of self-aligned p++-GaAs/n-InGaP hetero-junction field-effect transistors
Journal
Physica E: Low-dimensional Systems and Nanostructures
Journal Volume
13
Journal Issue
2-4
Pages
934-937
Date Issued
2002-03
Author(s)
Abstract
p++-GaAs/n-InGaP heterojunction field-effect transistors (HJFETs) with a highly carbon-doped gate and a wide-gap channel were reported. A self-aligned T-shaped gate HJFET exhibits a gate of 0.6 μm in length by depositing gate metal of 1.0 μm. DC characteristics including a turn-on voltage of 2.0 V at 1 mA/mm, a gate-drain breakdown voltage up to 30 V, a drain-source breakdown voltage exceeding 25 V, a maximum available transconductance of 160 mS/mm and AC performances such as a unit-current gain frequency of 16.8 GHz, and a unit-power gain frequency of 25 GHz were obtained for a non-self-aligned HJFET. With a self-aligned processing structure, the transconductance and fmax were improved to 230 mS/mm and 35 GHz, respectively. © 2002 Elsevier Science B.V. All rights reserved.
Subjects
Heterojunction field-effect transistor; Self-aligned; T-shaped gate
Other Subjects
Electric breakdown of solids; Heterojunctions; Semiconducting indium gallium arsenide; Semiconductor doping; Transconductance; Heterojunction field-effect transistors (HJFET); Field effect transistors
Type
journal article