https://scholars.lib.ntu.edu.tw/handle/123456789/303166
標題: | Optical beam induced current microscopy at DC and radio frequency | 作者: | Kao, F.-J. Chen, J.-C. SHENG-LUNG HUANG |
公開日期: | 2003 | 卷: | 1 | 起(迄)頁: | 84 | 來源出版物: | Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest | 摘要: | In this paper we have made a comparison of optical beam induced current (OBIC) imaging with DC and radio frequency (RF) contrast on a photodetector. The DC and RF contrasts are generated by a cw argon-krypton ion laser and a mode-locked TUsapphire laser, respectively. We have found that OBIC mapping at RF would allow profiling of the device's spatial distribution of temporal response. Thus the use of a pulsed laser in OBIC would contribute one more dimension in semiconductor device metrology. © 2003 IEEE. |
URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-34548646187&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/303166 |
DOI: | 10.1109/CLEOPR.2003.1274554 | SDG/關鍵字: | Argon lasers; Nanostructures; Photonics; Radio waves; Semiconductor devices; Semiconductor lasers; Krypton ion lasers; Mode-locked; Optical beam induced currents; Radio frequencies; Temporal response; Pulsed lasers |
顯示於: | 光電工程學研究所 |
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