Analog micromirror arrays with orthogonal scanning directions for wavelength-selective 1XN2 switches

A new high-port-count wavelength selective switch has been realized using two cross-scanning 1-axis analog micromirror arrays in a 4-f optical system. The number of output ports is increased from N to N2, where N is the maximum linear port count limited by optical diffraction. Using surface-micromachined micromirrors with hidden vertical combdrives, large scan angles (>±5° mechanical), low drive voltages (7V), and high fill factors (>96.25%) are achieved for both scanning mirrors. Experimental results of our 1x8 (3x3 collimator array) wavelength-selective switch are also reported. A fiber-to-fiber insertion loss of 6 dB and a switching time of < 700 μsec have been achieved. © 2003 IEEE.