https://scholars.lib.ntu.edu.tw/handle/123456789/303181
標題: | Analog micromirror arrays with orthogonal scanning directions for wavelength-selective 1XN2 switches | 作者: | JUI-CHE TSAI Huang, S. Hah, D. Wu, M.C. |
關鍵字: | Insertion loss; Low voltage; Micromirrors; Mirrors; Optical arrays; Optical collimators; Optical diffraction; Optical fiber losses; Optical surface waves; Optical switches | 公開日期: | 2003 | 卷: | 2 | 起(迄)頁: | 1776 - 1779 | 來源出版物: | TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers | 會議論文: | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers | 摘要: | A new high-port-count wavelength selective switch has been realized using two cross-scanning 1-axis analog micromirror arrays in a 4-f optical system. The number of output ports is increased from N to N2, where N is the maximum linear port count limited by optical diffraction. Using surface-micromachined micromirrors with hidden vertical combdrives, large scan angles (>±5° mechanical), low drive voltages (7V), and high fill factors (>96.25%) are achieved for both scanning mirrors. Experimental results of our 1x8 (3x3 collimator array) wavelength-selective switch are also reported. A fiber-to-fiber insertion loss of 6 dB and a switching time of < 700 μsec have been achieved. © 2003 IEEE. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-41549142850&doi=10.1109%2fSENSOR.2003.1217130&partnerID=40&md5=7491fd4335a6cd795dd8064afa54f5f0 http://scholars.lib.ntu.edu.tw/handle/123456789/303181 |
DOI: | 10.1109/SENSOR.2003.1217130 | SDG/關鍵字: | Actuators; Diffraction; Insertion losses; Microsystems; Mirrors; Optical fibers; Optical losses; Optical switches; Optical systems; Scanning; Solid-state sensors; Surface waves; Transducers; Low voltages; Micro mirror; Optical arrays; Optical diffractions; Optical fiber loss; Optical surface waves; Optical collimators |
顯示於: | 光電工程學研究所 |
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