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College of Management / 管理學院
Business Administration / 工商管理學系暨商學研究所
A Methodology for Optimizing Gate Oxide Pre-clean
Details
A Methodology for Optimizing Gate Oxide Pre-clean
Journal
Electrochemical Society
Date Issued
1993-05
Author(s)
RUEY-SHAN GUO
K. Srikrishna
M. Slama
R. Guo
S. Geha
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/304598
Type
conference paper