https://scholars.lib.ntu.edu.tw/handle/123456789/307547
Title: | High sensitive and wide detecting range MOS tunneling temperature sensors for on-chip temperature detection | Authors: | JENN-GWO HWU | Issue Date: | 2004 | Journal Volume: | 51 | Journal Issue: | 9 | Start page/Pages: | 1514-1521 | Source: | IEEE Transactions on Electron Devices | Abstract: | This paper examined the feasibility of applying a highly sensitive metal-oxide-semiconductor (MOS) tunneling temperature sensor, which was compatible with current CMOS technology. As the sensor was biased positively at a constant voltage, the gate current increased more than when the sensor was biased at a constant-current situation, its gate voltage magnitude changed significantly with substrate temperature, with a sensitivity exceeding -2 V/ °C. The improvement of temperature sensitivity in this paper is one thousand times over the sensitivity of a conventional p-n junction, i.e., namely, about -2 mV/ °C. Regarding a temperature sensor array, this paper proposes a method using gate current gain, rather than absolute gate current, to eliminate the gate current discrepancy among sensors. For constant current operation, a sensitivity exceeding 10 V/ °C can be obtained if the current level is suitable. Finally, this paper demonstrates a real temperature distribution for on-chip detection. With such a high temperature-sensitive sensor, accurate temperature detection can be incorporated into common CMOS circuits. © 2004 IEEE. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-4444254154&doi=10.1109%2fTED.2004.833571&partnerID=40&md5=83396319418c520c402809144ca6e002 http://scholars.lib.ntu.edu.tw/handle/123456789/307547 |
DOI: | 10.1109/TED.2004.833571 | SDG/Keyword: | Gate current; Temperature detection; Temperature sensitivity; Temperature sensor array; Tunneling temperature sensors; Arrays; CMOS integrated circuits; Electric currents; Electric potential; Integrated circuit layout; Semiconductor device structures; Semiconductor junctions; Sensors; Temperature distribution; Thermal effects; Tunnel diodes; MOS devices |
Appears in Collections: | 電機工程學系 |
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