https://scholars.lib.ntu.edu.tw/handle/123456789/307888| Title: | Real time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor | Authors: | Lee, C.-Y. Wu, T.-T. Chen, Y.-Y. Cheng, Y.-C. Chen, W.-J. Pao, S.-Y. Chang, P.-Z. Chen, P.-H. Yen, K.-H. Xiao, F.-Y. PING-HEI CHEN |
Issue Date: | 2004 | Journal Volume: | 5455 | Start page/Pages: | 319-330 | Source: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-8844235075&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/307888 |
DOI: | 10.1117/12.544959 |
| Appears in Collections: | 機械工程學系 |
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