https://scholars.lib.ntu.edu.tw/handle/123456789/307891| Title: | Fabrication of micro-optical switch by post-CMOS micromachining process | Authors: | Cheng, Y.-C. Lee, C.-Y. Dai, C.-L. Chen, W.-J. Chang, P.-Z. Chen, P.-H. PING-HEI CHEN |
Issue Date: | 2004 | Journal Volume: | 5455 | Start page/Pages: | 274-283 | Source: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-8844229674&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/307891 |
DOI: | 10.1117/12.545307 |
| Appears in Collections: | 機械工程學系 |
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