Fabrication of free-space MOEM component by CMOS process

Journal

Tamkang Journal of Science and Engineering

Journal Volume

7

Journal Issue

2

Pages

73-76

Date Issued

2004

Author(s)

Cheng, Y.-C.

Lee, C.-Y.

Dai, C.-L.

Chen, W.-J.

Chang, P.-Z.

Chen, P.-H.

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-2942739180&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/307892

Type

journal article