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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Fabrication of free-space MOEM component by CMOS process
Details
Fabrication of free-space MOEM component by CMOS process
Journal
Tamkang Journal of Science and Engineering
Journal Volume
7
Journal Issue
2
Pages
73-76
Date Issued
2004
Author(s)
Cheng, Y.-C.
Lee, C.-Y.
Dai, C.-L.
Chen, W.-J.
Chang, P.-Z.
Chen, P.-H.
PING-HEI CHEN
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-2942739180&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/307892
Type
journal article