A novel method for evaluating the thickness of silicon membrane using a micromachined acoustic wave sensor
Journal
Tamkang Journal of Science and Engineering
Journal Volume
7
Journal Issue
2
Pages
61-66
Date Issued
2004
Author(s)
Lee, C.-Y.
Cheng, Y.-C.
Wu, T.-T.
Chen, Y.-Y.
Chen, W.-J.
Pao, S.-Y.
Chang, P.-Z.
Chen, P.-H.
Yen, K.-H.
Xiao, F.-Y.
Type
journal article