High fill-factor two-axis analog micromirror array for 1×N 2 wavelength-selective switches
Journal
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages
101 - 104
Date Issued
2004
Author(s)
Abstract
We report on a two-axis analog micromirror array with high fill factor (96%) and large mechanical scan angles (±4.4° and ±3.4°). To our knowledge, this is the highest linear fill factor ever reported for two-axis analog micromirror arrays. A 1×14 wavelength-selective switch (WSS) was also demonstrated using the mirror array. This is the largest number of port count ever reported for WSS. The fiber-to-fiber insertion loss is 8.2 dB. Switching of < 2 msec has been achieved.
Event(s)
17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest
Other Subjects
Bit error rate; Microelectromechanical devices; Mirrors; Optical collimators; Optical switches; Polarization; Routers; Scanning; Steering; Wavelength division multiplexing; High fill factors; Micromirrors; Mirror array; Wavelength selective switches; Arrays
Type
conference paper