https://scholars.lib.ntu.edu.tw/handle/123456789/314480
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | JENN-GWO HWU | en |
dc.creator | Hwu, J.G. and Hwang, J.Z. and Chiou, Y.L. | - |
dc.date.accessioned | 2018-09-10T05:17:29Z | - |
dc.date.available | 2018-09-10T05:17:29Z | - |
dc.date.issued | 1985 | - |
dc.identifier.uri | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0021397771&doi=10.1016%2f0040-6090%2885%2990389-X&partnerID=40&md5=f612b92e4455d8ff301093794232ea2c | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/314480 | - |
dc.description.abstract | The trap charge at the Si(P)SiO2 interface was studied using the bias-temperature aging technique. The formation of the interface trap charge at the SiSiO2 interface is attributed to the mobile ion inside the oxide. The peak in the interface trap density distribution can be produced or eliminated by bias-temperature treatment and appears to be dependent on the preparation conditions. © 1985. | - |
dc.language | en | en |
dc.relation.ispartof | Thin Solid Films | en_US |
dc.source | AH | - |
dc.subject.other | CAPACITORS; ELECTRIC FIELDS; CAPACITANCE-VOLTAGE CURVES; ENERGY GAPS; INTERFACE TRAP DENSITY; SEMICONDUCTOR DEVICES, MOS | - |
dc.title | Impurity-related interface trap in an Al/SiO2/Si(P) capacitor | - |
dc.type | journal article | en |
dc.identifier.doi | 10.1016/0040-6090(85)90389-X | - |
dc.identifier.scopus | 2-s2.0-0021397771 | - |
dc.relation.pages | 17-23 | - |
dc.relation.journalvolume | 125 | - |
dc.relation.journalissue | 1-2 | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.openairetype | journal article | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.orcid | 0000-0001-9688-0812 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
顯示於: | 電機工程學系 |
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