https://scholars.lib.ntu.edu.tw/handle/123456789/314912| Title: | Application of the Taguchi's design of experiments to optimize a bromine chemistry-based etching recipe for deep silicon trenches | Authors: | CHEN, PH YAU, C WU, KY et al. PING-HEI CHEN |
Issue Date: | 2005 | Journal Volume: | 77 | Journal Issue: | 2 | Start page/Pages: | 110-115 | Source: | Microelectronic Engineering | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/314912 | DOI: | 10.1016/j.mee.2004.09.001 |
| Appears in Collections: | 機械工程學系 |
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