Direct imprinting using soft mold and gas pressure for large area and curved surface
Journal
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Journal Volume
23
Journal Issue
6
Pages
1687-1690
Date Issued
2005-11
Author(s)
Abstract
In this paper we report a simple and effective method that renders direct imprinting of sub-micron structures onto PMMA resist coated on large area and curved substrates using the PDMS mold on a closed chamber. Nitrogen gas was employed to generate a uniform pressure. The patterns of the soft mold could be replicated with high quality over an entire 12in. resist-coated area. The process was further successfully applied to the imprinting of a curved substrate.
Type
journal article