Lateral nonuniformity of effective oxide charges in MOS capacitors with A12O3 gate dielectrics

Journal

IEEE Transactions on Electron Devices

Journal Volume

53

Journal Issue

7

Pages

1608-1614

Date Issued

2006

Author(s)

Huang, S.-W.

Hwu, J.-G.

DOI

10.1109/TED.2006.875816

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-33745714970&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/321870

Type

journal article