https://scholars.lib.ntu.edu.tw/handle/123456789/321874| Title: | Enhancement in ultrathin oxide growth by thermal-induced tensile stress | Authors: | Hung, C.-J. Hwu, J.-G. JENN-GWO HWU |
Issue Date: | 2006 | Journal Volume: | 6 | Journal Issue: | 1 | Start page/Pages: | 28-32 | Source: | IEEE Transactions on Device and Materials Reliability | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-33645801785&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/321874 |
DOI: | 10.1109/TDMR.2006.870339 |
| Appears in Collections: | 電機工程學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
