https://scholars.lib.ntu.edu.tw/handle/123456789/321875| Title: | Comparison of saturation current characteristics for ultrathin silicon oxides grown on n- and p-type silicon substrates simultaneously | Authors: | Wang, T.-M. Chang, C.-H. Chang, S.-J. Hwu, J.-G. JENN-GWO HWU |
Issue Date: | 2006 | Journal Volume: | 24 | Journal Issue: | 6 | Start page/Pages: | 2049-2053 | Source: | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-33750932367&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/321875 |
DOI: | 10.1116/1.2345648 |
| Appears in Collections: | 電機工程學系 |
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