https://scholars.lib.ntu.edu.tw/handle/123456789/321881| Title: | Enhanced nitrogen incorporation and improved breakdown endurance in nitrided gate oxides prepared by anodic oxidation followed by rapid thermal nitridation in N2O | Authors: | Jeng, M.-J. Hwu, J.-G. JENN-GWO HWU |
Issue Date: | 1996 | Journal Volume: | 69 | Journal Issue: | 25 | Start page/Pages: | 3875-3877 | Source: | Applied Physics Letters | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0000228733&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/321881 |
DOI: | 10.1063/1.117134 |
| Appears in Collections: | 電機工程學系 |
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