https://scholars.lib.ntu.edu.tw/handle/123456789/321882
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Lee, K.-C. | en_US |
dc.contributor.author | JENN-GWO HWU | en_US |
dc.creator | Lee, K.-C.;Hwu, J.-G. | - |
dc.date.accessioned | 2018-09-10T05:52:21Z | - |
dc.date.available | 2018-09-10T05:52:21Z | - |
dc.date.issued | 1996 | - |
dc.identifier.uri | http://www.scopus.com/inward/record.url?eid=2-s2.0-0030562435&partnerID=MN8TOARS | - |
dc.description.abstract | In this paper, the irradiation-then-nitridation (ITN) method was suggested to prepare oxynitrides. After 60 Co 1 Mrad irradiation, oxides were nitrided in N 2 O to become oxynitrides. They are more radiation hard than those nitrided in N 2 O directly. The difference can be explained by assuming that ITN process introduces more nitrogen Si0 2 /Si interfaces and hence improves radiation hardness. | - |
dc.language | en | en |
dc.relation.ispartof | Applied Surface Science | en_US |
dc.source | AH | - |
dc.subject.other | Capacitors; Dielectric materials; Interfaces (materials); Irradiation; MOS devices; Nitriding; Nitrogen; Oxides; Radiation hardening; Semiconducting silicon; Semiconductor device manufacture; Silica; Irradiation then nitridation; MOS capacitors; Nitrided oxides; Oxynitrides; Radiation hardness; Nitrogen compounds | - |
dc.title | Application of irradiation-then-nitridation to improve the radiation hardness in MOS gate dielectrics | - |
dc.type | journal article | en |
dc.identifier.doi | 10.1016/0169-4332(95)00230-8 | - |
dc.identifier.scopus | 2-s2.0-0030562435 | - |
dc.relation.pages | 204-207 | - |
dc.relation.journalvolume | 92 | - |
item.openairetype | journal article | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.orcid | 0000-0001-9688-0812 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
顯示於: | 電機工程學系 |
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