https://scholars.lib.ntu.edu.tw/handle/123456789/322468
Title: | A study on wafer thinning techniques with residual stress estimation | Authors: | Young, H.-T. Lin, C.-C. Chang, M.-T. Liao, H.-T. HONG-TSU YOUNG |
Issue Date: | 2006 | Journal Volume: | 2 | Start page/Pages: | 304-307 | Source: | 6th International Conference European Society for Precision Engineering and Nanotechnology, 2006 | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84908338144&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/322468 |
Appears in Collections: | 機械工程學系 |
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