https://scholars.lib.ntu.edu.tw/handle/123456789/324102| Title: | Conductive atomic force microscopy application for semiconductor failure analysis in advanced nanometer process | Authors: | Lin, K. Zhang, H. Lu, S.-S. SHEY-SHI LU |
Issue Date: | 2006 | Journal Volume: | 2006 | Start page/Pages: | 178-181 | Source: | International Symposium for Testing and Failure Analysis | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-33847657448&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/324102 |
| Appears in Collections: | 電機工程學系 |
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