https://scholars.lib.ntu.edu.tw/handle/123456789/329948
DC Field | Value | Language |
---|---|---|
dc.contributor.author | JENN-GWO HWU | en |
dc.creator | Jeng, M.-J. and Hwu, J.-G. | - |
dc.date.accessioned | 2018-09-10T06:24:01Z | - |
dc.date.available | 2018-09-10T06:24:01Z | - |
dc.date.issued | 1997 | - |
dc.identifier.uri | http://www.scopus.com/inward/record.url?eid=2-s2.0-0031496818&partnerID=MN8TOARS | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/329948 | - |
dc.language | en | en |
dc.relation.ispartof | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | - |
dc.source | AH | - |
dc.title | Preparation of low-temperature fluorinated oxides by anodic oxidation in dilute hydrofluosilicic acid (H2SiF6) solution | - |
dc.type | journal article | en |
dc.identifier.doi | 10.1116/1.580493 | - |
dc.relation.pages | 369-373 | - |
dc.relation.journalvolume | 15 | - |
dc.relation.journalissue | 2 | - |
item.grantfulltext | none | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.openairetype | journal article | - |
item.fulltext | no fulltext | - |
item.cerifentitytype | Publications | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.orcid | 0000-0001-9688-0812 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
Appears in Collections: | 電機工程學系 |
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