https://scholars.lib.ntu.edu.tw/handle/123456789/329949| Title: | New temperature compensation method for Si wafers in rapid thermal processor using separated Si rings as susceptors | Authors: | JENN-GWO HWU | Issue Date: | 1997 | Journal Volume: | 470 | Start page/Pages: | 187-192 | Source: | Materials Research Society Symposium - Proceedings | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0031357581&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/329949 |
| Appears in Collections: | 電機工程學系 |
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