https://scholars.lib.ntu.edu.tw/handle/123456789/330603
標題: | A method for mechanical characterization of capacitive devices at wafer level via detecting the pull-in voltages of two test bridges with different lengths | 作者: | Hu, Yuh-Chung WEN-PIN SHIH Shih, Wen-Pin Lee, Guan-De |
公開日期: | 2007 | 卷: | 17 | 期: | 6 | 起(迄)頁: | 1099-1106 | 來源出版物: | Journal of Micromechanics and Microengineering | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-34249667277&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/330603 |
DOI: | 10.1088/0960-1317/17/6/001 |
顯示於: | 機械工程學系 |
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