A low actuation voltage electrostatic actuator for RF MEMS switch applications

Journal

Journal of Micromechanics and Microengineering

Journal Volume

17

Journal Issue

8

Pages

1649-1656

Date Issued

2007

Author(s)

Chu, C.-H.

Shih, W.-P.

Chung, S.-Y.

Tsai, H.-C.

Shing, T.-K.

Chang, P.-Z.

DOI

10.1088/0960-1317/17/8/031

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-34547657513&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/330604

Type

journal article