https://scholars.lib.ntu.edu.tw/handle/123456789/340820
標題: | Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators | 作者: | JUI-CHE TSAI Lu, L.-C. Hsu, W.-C. Sun, C.-W. Wu, M.C. |
公開日期: | 2008 | 卷: | 18 | 期: | 1 | 來源出版物: | Journal of Micromechanics and Microengineering | 摘要: | A driving scheme using a pair of differential voltages (Vx, Vy) over a bias voltage is proposed to linearize the dc characteristic (angle versus voltage) of a two-axis MEMS scanner. The micromirror has a gimbal-less structure and is driven by vertical comb-drive actuators in conjunction with a leverage mechanism. At an optimal bias voltage of 53 V, a linear optical scan range of 3.2° is achieved experimentally in both the x and y directions with the differential voltages ranging from -10 V to + 10 V. © 2008 IOP Publishing Ltd. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-41849147844&doi=10.1088%2f0960-1317%2f18%2f1%2f015015&partnerID=40&md5=4383278150cee0e1ad250df6ba7a2458 | ISSN: | 09601317 | DOI: | 10.1088/0960-1317/18/1/015015 | SDG/關鍵字: | Bias voltage; Linearization; MEMS; Mirrors; Comb-drive actuators; Gimbal-less structure; MEMS scanner; Micromirrors; Actuators |
顯示於: | 光電工程學研究所 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。