https://scholars.lib.ntu.edu.tw/handle/123456789/340842
Title: | Fabrication of sub-micrometer Si spheres with atomic-scale surface smoothness using homogenized KrF excimer laser reformation system | Authors: | Hung, S.-C. Shiu, S.-C. Chao, C.-H. CHING-FUH LIN |
Issue Date: | 2008 | Start page/Pages: | 124-125 | Source: | 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-54049144765&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/340842 |
DOI: | 10.1109/OMEMS.2008.4607860 |
Appears in Collections: | 電機工程學系 |
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