Characterization of Si nanorods by spectroscopic ellipsometry with efficient theoretical modeling
Resource
Physica Status Solidi (a) 205 (4): 876-879
Journal
Physica Status Solidi (A) Applications and Materials Science
Journal Volume
205
Journal Issue
4
Pages
876-879
Date Issued
2008
Author(s)
Hsu, S.-H.
Liu, E.-S.
Chang, Y.-C.
Hilfiker, J.N.
Kim, Y.D.
Kim, T.J.
Lin, C.-J.
Type
journal article