Characterization of Si nanorods by spectroscopic ellipsometry with efficient theoretical modeling
Resource
Physica Status Solidi (a) 205 (4): 876-879
Journal
Physica Status Solidi (A) Applications and Materials Science
Journal Volume
205
Journal Issue
4
Pages
876-879
Date Issued
2008
Author(s)
Hsu, S.-H.
Liu, E.-S.
Chang, Y.-C.
Hilfiker, J.N.
Kim, Y.D.
Kim, T.J.
Lin, C.-J.
Abstract
Abstract Spectroscopic ellipsometry (SE) is applied to characterize Si columnar nanostructures. By employing effective medium approximation (EMA) theory, Si nanorods are treated as a graded layer with each sub‐layer modeled as a mixture of Si and voids with varying porosity fraction. In addition, the rigorous coupled‐wave analysis and finite‐element Green's function method were used in modeling Si nanorods as a stack of disks with varying diameters and thicknesses, and the calculations are in satisfactory agreement with the measurement results. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
Type
journal article