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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Hybrid servo design for large area nano pattern stitching
Details
Hybrid servo design for large area nano pattern stitching
Journal
IEEE/ASME International Conference on Advanced Intelligent Mechatronics
Pages
1572-1576
Date Issued
2009
Author(s)
Yen, J.-Y.
Chen, C.-H.
Chen, L.-S.
Tsai, K.-Y.
Chang, S.-H.
KUEN-YU TSAI
JIA-YUSH YEN
DOI
10.1109/AIM.2009.5229847
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-70350451291&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/347227
Type
conference paper