https://scholars.lib.ntu.edu.tw/handle/123456789/347227| Title: | Hybrid servo design for large area nano pattern stitching | Authors: | Yen, J.-Y. Chen, C.-H. Chen, L.-S. Tsai, K.-Y. Chang, S.-H. KUEN-YU TSAI JIA-YUSH YEN |
Issue Date: | 2009 | Start page/Pages: | 1572-1576 | Source: | IEEE/ASME International Conference on Advanced Intelligent Mechatronics | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-70350451291&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/347227 |
DOI: | 10.1109/AIM.2009.5229847 |
| Appears in Collections: | 機械工程學系 |
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