Thin silicon oxide films on N-type 4H-SiC prepared by scanning frequency anodization method

Journal

Microelectronic Engineering

Journal Volume

86

Journal Issue

11

Pages

2207-2210

Date Issued

2009

Author(s)

Chuang, K.-C.

Hwu, J.-G.

DOI

10.1016/j.mee.2009.03.038

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-69549126285&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/347695

Type

journal article