https://scholars.lib.ntu.edu.tw/handle/123456789/347695| Title: | Thin silicon oxide films on N-type 4H-SiC prepared by scanning frequency anodization method | Authors: | Chuang, K.-C. Hwu, J.-G. JENN-GWO HWU |
Issue Date: | 2009 | Journal Volume: | 86 | Journal Issue: | 11 | Start page/Pages: | 2207-2210 | Source: | Microelectronic Engineering | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-69549126285&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/347695 |
DOI: | 10.1016/j.mee.2009.03.038 |
| Appears in Collections: | 電機工程學系 |
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