https://scholars.lib.ntu.edu.tw/handle/123456789/347707
標題: | Fluorinated thin gate oxides prepared by room temperature deposition followed by furnace oxidation | 作者: | Yeh, K.-L. Jeng, M.-J. JENN-GWO HWU |
公開日期: | 1999 | 卷: | 43 | 期: | 3 | 起(迄)頁: | 671-676 | 來源出版物: | Solid-State Electronics | 摘要: | Room temperature deposition in H2SiF6 solution, i.e., liquid phase deposition (LPD), followed by furnace oxidation (FO) is first used to prepare fluorinated thin oxides (LPD/FO). The amount of fluorine existing in the gate oxide is controlled by varying the LPD time in this work. A turnaround breakdown behavior is observed for LPD/FO oxides with various LPD conditions. The oxide with an optimized fluorine concentration shows a significant improvement in oxide breakdown characteristics. © 1999 Elsevier Science Ltd. All rights reserved. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0033101293&doi=10.1016%2fS0038-1101%2898%2900284-6&partnerID=40&md5=fcaea24565d6e41fa14ae615ffe6680c http://scholars.lib.ntu.edu.tw/handle/123456789/347707 |
DOI: | 10.1016/S0038-1101(98)00284-6 | SDG/關鍵字: | Deposition; Fluorine; Optimization; Oxidation; Oxides; Fluorinated thin gate oxides; Furnace oxidation (FO); Liquid phase depositions (LPD); ULSI circuits |
顯示於: | 電機工程學系 |
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