https://scholars.lib.ntu.edu.tw/handle/123456789/347707
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Yeh, K.-L. | en_US |
dc.contributor.author | Jeng, M.-J. | en_US |
dc.contributor.author | JENN-GWO HWU | en_US |
dc.creator | Yeh, K.-L.;Jeng, M.-J.;Hwu, J.-G. | - |
dc.date.accessioned | 2018-09-10T07:29:09Z | - |
dc.date.available | 2018-09-10T07:29:09Z | - |
dc.date.issued | 1999 | - |
dc.identifier.uri | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0033101293&doi=10.1016%2fS0038-1101%2898%2900284-6&partnerID=40&md5=fcaea24565d6e41fa14ae615ffe6680c | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/347707 | - |
dc.description.abstract | Room temperature deposition in H2SiF6 solution, i.e., liquid phase deposition (LPD), followed by furnace oxidation (FO) is first used to prepare fluorinated thin oxides (LPD/FO). The amount of fluorine existing in the gate oxide is controlled by varying the LPD time in this work. A turnaround breakdown behavior is observed for LPD/FO oxides with various LPD conditions. The oxide with an optimized fluorine concentration shows a significant improvement in oxide breakdown characteristics. © 1999 Elsevier Science Ltd. All rights reserved. | - |
dc.language | en | en |
dc.relation.ispartof | Solid-State Electronics | en_US |
dc.source | AH | - |
dc.subject.other | Deposition; Fluorine; Optimization; Oxidation; Oxides; Fluorinated thin gate oxides; Furnace oxidation (FO); Liquid phase depositions (LPD); ULSI circuits | - |
dc.title | Fluorinated thin gate oxides prepared by room temperature deposition followed by furnace oxidation | - |
dc.type | journal article | en |
dc.identifier.doi | 10.1016/S0038-1101(98)00284-6 | - |
dc.relation.pages | 671-676 | - |
dc.relation.journalvolume | 43 | - |
dc.relation.journalissue | 3 | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.openairetype | journal article | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.orcid | 0000-0001-9688-0812 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
顯示於: | 電機工程學系 |
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