https://scholars.lib.ntu.edu.tw/handle/123456789/348054| Title: | Chemical-mechanical polishing of low dielectric constant poly(silsesquioxane): HSQ | Authors: | Chen, W.-C. Yen, C.-T. WEN-CHANG CHEN |
Issue Date: | 1999 | Journal Volume: | 6 | Journal Issue: | 3 | Start page/Pages: | 197-202 | Source: | Journal of Polymer Research | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0033326173&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/348054 |
DOI: | 10.1007/s10965-006-0088-x |
| Appears in Collections: | 化學工程學系 |
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