https://scholars.lib.ntu.edu.tw/handle/123456789/348054
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Chen, W.-C. | en_US |
dc.contributor.author | Yen, C.-T. | en_US |
dc.contributor.author | WEN-CHANG CHEN | en_US |
dc.creator | WEN-CHANG CHEN;Yen, C.-T.;Chen, W.-C. | - |
dc.date.accessioned | 2018-09-10T07:30:22Z | - |
dc.date.available | 2018-09-10T07:30:22Z | - |
dc.date.issued | 1999 | - |
dc.identifier.uri | http://www.scopus.com/inward/record.url?eid=2-s2.0-0033326173&partnerID=MN8TOARS | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/348054 | - |
dc.language | en | en |
dc.relation.ispartof | Journal of Polymer Research | - |
dc.source | AH | - |
dc.title | Chemical-mechanical polishing of low dielectric constant poly(silsesquioxane): HSQ | - |
dc.type | journal article | en |
dc.identifier.doi | 10.1007/s10965-006-0088-x | - |
dc.identifier.scopus | 2-s2.0-0033326173 | - |
dc.identifier.isi | WOS:000084675000008 | - |
item.fulltext | no fulltext | - |
item.grantfulltext | none | - |
dc.relation.pages | 197-202 | - |
dc.relation.journalvolume | 6 | - |
dc.relation.journalissue | 3 | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.openairetype | journal article | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
crisitem.author.dept | Chemical Engineering | - |
crisitem.author.dept | Office of the President | - |
crisitem.author.orcid | 0000-0003-3170-7220 | - |
crisitem.author.parentorg | College of Engineering | - |
crisitem.author.parentorg | Administrative Unit | - |
顯示於: | 化學工程學系 |
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