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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Characterization of dressing behaviors and optimization technique in chemical mechanical polishing
Details
Characterization of dressing behaviors and optimization technique in chemical mechanical polishing
Journal
ECS Transactions
Journal Volume
19
Journal Issue
7
Pages
61-71
Date Issued
2009
Author(s)
Chen, K.R.
Young, H.T.
Chen, K.R.
Young, H.T.
HONG-TSU YOUNG
DOI
10.1149/1.3123775
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-73949107984&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/348469
Type
conference paper