https://scholars.lib.ntu.edu.tw/handle/123456789/348469| Title: | Characterization of dressing behaviors and optimization technique in chemical mechanical polishing | Authors: | Chen, K.R. Young, H.T. Chen, K.R. Young, H.T. Chen, K.R. HONG-TSU YOUNG Young, H.T. |
Issue Date: | 2009 | Journal Volume: | 19 | Journal Issue: | 7 | Start page/Pages: | 61-71 | Source: | ECS Transactions | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-73949107984&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/348469 |
DOI: | 10.1149/1.3123775 |
| Appears in Collections: | 機械工程學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.