https://scholars.lib.ntu.edu.tw/handle/123456789/348469
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Chen, K.R. | en_US |
dc.contributor.author | Young, H.T. | en_US |
dc.contributor.author | Chen, K.R. | en_US |
dc.contributor.author | Young, H.T. | en_US |
dc.contributor.author | HONG-TSU YOUNG | en_US |
dc.creator | Young, H.T.;HONG-TSU YOUNG;Chen, K.R.;Young, H.T.;Chen, K.R.;Young, H.T.;Chen, K.R.;Young, H.T.;HONG-TSU YOUNG;Chen, K.R. | - |
dc.date.accessioned | 2018-09-10T07:31:36Z | - |
dc.date.available | 2018-09-10T07:31:36Z | - |
dc.date.issued | 2009 | - |
dc.identifier.uri | http://www.scopus.com/inward/record.url?eid=2-s2.0-73949107984&partnerID=MN8TOARS | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/348469 | - |
dc.language | en | en |
dc.relation.ispartof | ECS Transactions | en_US |
dc.source | AH | - |
dc.title | Characterization of dressing behaviors and optimization technique in chemical mechanical polishing | - |
dc.type | conference paper | en |
dc.identifier.doi | 10.1149/1.3123775 | - |
dc.relation.pages | 61-71 | - |
dc.relation.journalvolume | 19 | - |
dc.relation.journalissue | 7 | - |
item.fulltext | no fulltext | - |
item.openairetype | conference paper | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
crisitem.author.orcid | 0000-0002-8866-7648 | - |
顯示於: | 機械工程學系 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。