https://scholars.lib.ntu.edu.tw/handle/123456789/350137
Title: | Fabrication of submicron Si spheres on SOI platform by using excimer laser reformation technique | Authors: | Hung, S.C. Shiu, S.C. Chao, C.S. CHING-FUH LIN |
Issue Date: | 2009 | Source: | Optics InfoBase Conference Papers | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84897963541&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/350137 |
Appears in Collections: | 電機工程學系 |
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