https://scholars.lib.ntu.edu.tw/handle/123456789/350139
Title: | Fabrication of crystalline Si spheres with atomic-scale surface smoothness using homogenized KrF excimer laser reformation system | Authors: | Hung, Shih-Che Shiu, Shu-Chia Chao, Cha-Hsin CHING-FUH LIN |
Issue Date: | 2009 | Journal Volume: | 27 | Journal Issue: | 3 | Start page/Pages: | 1156-1160 | Source: | Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-79953859779&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/350139 |
DOI: | 10.1116/1.3137963 |
Appears in Collections: | 電機工程學系 |
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