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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane
Details
Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane
Date Issued
2009-06
Author(s)
Scott Smith
David Mills
Jeffrey Fortin
Wei-Cheng Tian
John Logan
WEI-CHENG TIAN
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/352306
Type
patent