https://scholars.lib.ntu.edu.tw/handle/123456789/352317
Title: | Fabrication of sub-quarter-micron grating patterns by employing DUV holographic lithography | Authors: | L. A. Wang C. H. Lin J. H. Chen LON A. WANG |
Issue Date: | May-1999 | Journal Volume: | 46 | Journal Issue: | 1 | Start page/Pages: | 173-177 | Source: | Microelectronic Engineering | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/352317 | DOI: | 10.1016/S0167-9317(99)00057-X |
Appears in Collections: | 光電工程學研究所 |
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