Shape-controlled microlens arrays fabricated by diffuser lithography

Journal

Microelectronic Engineering

Journal Volume

87

Journal Issue

5-8

Pages

1420-1423

Date Issued

2010

Author(s)

Kang, J.-M.

Wei, M.-K.

Lin, H.-Y.

Lee, J.-H.

Lin, H.-Y.

Tsai, J.-H.

Wu, T.-C.

DOI

10.1016/j.mee.2009.11.146

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-76949088672&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/357882

Type

journal article