https://scholars.lib.ntu.edu.tw/handle/123456789/357969
Title: | Fabrication of deep si trenches by self-assembled wet chemical etching process | Authors: | Hung, S.C. Shiu, S.C. Chao, J.J. Lin, C.F. CHING-FUH LIN |
Issue Date: | 2010 | Journal Volume: | 157 | Journal Issue: | 9 | Source: | Journal of the Electrochemical Society | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-77955795727&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/357969 |
DOI: | 10.1149/1.3462976 |
Appears in Collections: | 電機工程學系 |
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