https://scholars.lib.ntu.edu.tw/handle/123456789/359315
標題: | Beam drift detection using a two-dimensional electron beam position monitor system for multiple-electron-beam–direct-write lithography | 作者: | Sheng-Yung Chen Kuen-Yu Tsai Hoi-Tou Ng Chi-Hsiung Fan Ting-Han Pei Chieh-Hsiung Kuan Yung-Yaw Chen Yi-Hung Kuo Cheng-Ju Wu Jia-Yush Yen KUEN-YU TSAI |
公開日期: | 六月-2010 | 起(迄)頁: | 2-10 | 來源出版物: | The 54th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/359315 |
顯示於: | 電機工程學系 |
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