https://scholars.lib.ntu.edu.tw/handle/123456789/362678
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Yen, J.-Y. | en_US |
dc.contributor.author | Chen, L.-S. | en_US |
dc.contributor.author | Chiu, P. | en_US |
dc.contributor.author | JIA-YUSH YEN | en_US |
dc.creator | Jia-Yush Yen;Chiu, P.;Chen, L.-S.;Yen, J.-Y. | - |
dc.date.accessioned | 2018-09-10T08:35:13Z | - |
dc.date.available | 2018-09-10T08:35:13Z | - |
dc.date.issued | 2011 | - |
dc.identifier.uri | http://www.scopus.com/inward/record.url?eid=2-s2.0-80053979240&partnerID=MN8TOARS | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/362678 | - |
dc.language | en | en |
dc.relation.ispartof | IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM | - |
dc.source | AH | - |
dc.title | Line stitching in servo-assisted electron beam lithography system | - |
dc.type | conference paper | en |
dc.identifier.doi | 10.1109/AIM.2011.6027026 | - |
dc.identifier.scopus | 2-s2.0-80053979240 | - |
dc.relation.pages | 397-402 | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.openairetype | conference paper | - |
item.grantfulltext | none | - |
crisitem.author.orcid | 0000-0001-8795-9211 | - |
顯示於: | 機械工程學系 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。