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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
Electrical characteristics and temperature response of Al 2O 3 gate dielectrics with and without nitric acid compensation
Details
Electrical characteristics and temperature response of Al 2O 3 gate dielectrics with and without nitric acid compensation
Journal
ECS Transactions
Journal Volume
41
Journal Issue
3
Pages
361-371
Date Issued
2011
Author(s)
Lin, C.-C.
Hwu, J.-G.
JENN-GWO HWU
DOI
10.1149/1.3633052
URI
http://www.scopus.com/inward/record.url?eid=2-s2.0-84863145043&partnerID=MN8TOARS
http://scholars.lib.ntu.edu.tw/handle/123456789/363034
Type
conference paper
