Near optimal furnace tool allocation with batching and waiting time constraints
Journal
IEEE International Conference on Automation Science and Engineering
Pages
108-113
Date Issued
2011
Author(s)
Kao, Y.-T.
Zhan, S.-C.
Chang, S.-C.
Ho, J.-H.
Wang, P.
Luh, P.B.
Wang, S.
Wang, F.
Chang, J.
Type
conference paper