Enhanced optical performance by energetic hydrogen passivation at Si/oxide interface

Journal

Thin Solid Films

Journal Volume

520

Journal Issue

1

Pages

448-451

Date Issued

2011

Author(s)

Ho, W.S.

Deng, Y.

Chen, Y.-Y.

Cheng, T.-H.

Liu, C.W.

Tsai, W.-F.

Ai, C.-F.

DOI

10.1016/j.tsf.2011.06.036

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-80054019468&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/365231

Type

journal article